Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Simulation of microwave pulsing in a radial line slot ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna. On the Near-Field Shaping and Focusing Capability of a ... the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION US9852893B2 - Dipole ring magnet assisted microwave radial ...
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Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Characterization of the slot antenna microwave plasma source ... Abstract: An annular ring slot antenna is used as the generation of large-volume 2.45-GHz microwave plasma. With argon, a surface wave at the quartz tube can be excited above 250 W. Optical emissions testify the existence of azimuthal modes of m=4 at a pressure of 10 Pa and m=6 at a pressure of 230 Pa. TEL Release TriasTM SPA Plasma Processing System Capable of ... Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL, after long years of cultivating plasma technology.
Optimization of Radial Line Slot Array Antenna Feeder Design for Direct Broadcast Satellite Services. By. Stephen Badu ... Radial Line Slots Array (LP- RLSA) Antenna Feeders design are used ..... plasma generation,” Antennas Propag. Soc.
Radial Line Slot Antennas - Springer communication antenna, plasma etching, and high power use. ... Radial line; Slot antenna; Circular polarization; Linear polarization; Direct broadcast satellite; ... Characteristics of large-diameter plasma using a radial-line slot antenna Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and ... Design of a Concentric Array Radial Line Slot Antenna for High-Power ... Jan 27, 2015 ... A compact concentric array radial line slot antenna (CA-RLSA) operating at ... Published in: IEEE Transactions on Plasma Science ( Volume: 43 ...
Multiphysics Coupling Simulation of Silicon Nitride CVD ...
The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications. JSAP was ... Characteristics of large-diameter plasma using a radial ... Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ... Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Simulation of microwave pulsing in a radial line slot ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.
The radial line slot antenna (RLSA) is a slotted waveguide planar antenna, which ... [5], which proves feasible in using radial line waveguide to feed the antenna .... Application,” IEEE Transactions on Plasma Science., vol. 43, pp. 3527. - 3529 ...
the slots of the antenna. The spillover efficiency is maximiz ed during the design process. The antenna is centrally fed by a simple coaxial probe. The antenna design is validated by a prototype and measurements at 12.5 GHz. Index Terms—Near field, focusing, radial line slot array, RLSA, near-field shaping. I. INTRODUCTION
Radial Line Slot Antennas Hiroyuki Arai* Yokohama National University, Yokohama, Kanagawa, Japan Abstract This chapter presents the development history of radial line slot antenna. The antennas are used for circular polarized high-gain antenna in microwave and … Radial Line Slot Antennas | Request PDF